Optical properties of fluorinated silicon oxide and organic spin-on-glass films for thin-film optical waveguides

Tetsuya Homma, Yuhji Ariyama, Hiroyasu Kondo, Masaya Sakamoto, Shigeru Kanegae, Masahiro Itoh, Masaki Yamaguchi, Hideo Takahashi

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy