Optical Properties of Fluorinated Silicon Oxide Fims by Liquid Phase Deposition for Optical Waveguides

T.Homma T.Homma, A.Satoh A.Satoh, S.Okada S.Okada, M.Itoh M.Itoh, M.Yamaguchi M.Yamaguchi, H.Takahashi H.Takahashi, Tetsuya Homma

Research output: Contribution to journalArticle

12 Citations (Scopus)
Original languageEnglish
Pages (from-to)698-702
JournalIEEE Transactions on Instrumentation & Measurement
Volume47
Publication statusPublished - 1998 Jun 1

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T.Homma, T. H., A.Satoh, A. S., S.Okada, S. O., M.Itoh, M. I., M.Yamaguchi, M. Y., H.Takahashi, H. T., & Homma, T. (1998). Optical Properties of Fluorinated Silicon Oxide Fims by Liquid Phase Deposition for Optical Waveguides. IEEE Transactions on Instrumentation & Measurement, 47, 698-702.