Optical Properties of Fluorinated Silicon Oxide Fims by Liquid Phase Deposition for Optical Waveguides

T.Homma T.Homma; A.Satoh A.Satoh; S.Okada S.Okada; M.Itoh M.Itoh; M.Yamaguchi M.Yamaguchi; H.Takahashi H.Takahashi; Tetsuya Homma

Optical Properties of Fluorinated Silicon Oxide Fims by Liquid Phase Deposition for Optical Waveguides

T.Homma T.Homma, A.Satoh A.Satoh, S.Okada S.Okada, M.Itoh M.Itoh, M.Yamaguchi M.Yamaguchi, H.Takahashi H.Takahashi, Tetsuya Homma

Functional Control Systems

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Original language	English
Pages (from-to)	698-702
Journal	IEEE Transactions on Instrumentation & Measurement
Volume	47
Publication status	Published - 1998 Jun 1

Cite this

@article{eb3158306be1471a908770a2c0227cfe,

title = "Optical Properties of Fluorinated Silicon Oxide Fims by Liquid Phase Deposition for Optical Waveguides",

author = "T.Homma T.Homma and A.Satoh A.Satoh and S.Okada S.Okada and M.Itoh M.Itoh and M.Yamaguchi M.Yamaguchi and H.Takahashi H.Takahashi and Tetsuya Homma",

year = "1998",

month = jun,

day = "1",

language = "English",

volume = "47",

pages = "698--702",

journal = "IEEE Transactions on Instrumentation & Measurement",

}

TY - JOUR

T1 - Optical Properties of Fluorinated Silicon Oxide Fims by Liquid Phase Deposition for Optical Waveguides

AU - T.Homma, T.Homma

AU - A.Satoh, A.Satoh

AU - S.Okada, S.Okada

AU - M.Itoh, M.Itoh

AU - M.Yamaguchi, M.Yamaguchi

AU - H.Takahashi, H.Takahashi

AU - Homma, Tetsuya

PY - 1998/6/1

Y1 - 1998/6/1

M3 - Article

VL - 47

SP - 698

EP - 702

JO - IEEE Transactions on Instrumentation & Measurement

JF - IEEE Transactions on Instrumentation & Measurement

ER -