Organic plasma process for simple and substrate-independent surface modification of polymeric BioMEMS devices

Atsunori Hiratsuka, Hitoshi Muguruma, Kyong Hoon Lee, Isao Karube

Research output: Contribution to journalArticle

45 Citations (Scopus)


A polymeric bio micro electromechanical systems (BioMEMS) device was fabricated using organic plasma polymerization, by which the surface of a polymeric substrate could easily be modified through vapor-phase deposition of organic thin films. This technique, capable of polymeric deposition of any kind of monomer, can serve the purpose of anti-fouling coating, wettability control, or layer-to-layer interface creation, on the surface of any given chemically-inert polymeric substrate without involving cumbersome surface organic reactions. A prototype device was fabricated to have an array of electrochemical glucose biosensors with the three electrode configuration, each of which has a microfluidic channel (500 μm×800 μm) for capillary-action-driven sample delivery and the concerned enzymatic reaction. Stressing the advantages of the plasma polymerization process using a polymeric substrate together with some additional features accomplished in our device fabrication, new possibilities in the field of polymeric BioMEMS are discussed.

Original languageEnglish
Pages (from-to)1667-1672
Number of pages6
JournalBiosensors and Bioelectronics
Issue number12
Publication statusPublished - 2004 Jul 15



  • Bio electromechanical micro system
  • Biosensor
  • Electrode
  • Enzyme
  • Plasma-polymerized film

ASJC Scopus subject areas

  • Biotechnology
  • Biophysics
  • Biomedical Engineering
  • Electrochemistry

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