Abstract
Nonlinear dependence of sheet resistance change for Cu film on humidity was observed during temperature humidity storage (THS) test to evaluate the lifetime of Cu film in long-term storage in an environment. X-ray photoelectron spectroscopy (XPS) was adopted to investigate the change of oxidation structure depending on the humidity. Relative volume ratio of Cu, Cu20, and CuO was considered as the reason for the nonlinear dependence. The dominant reaction of oxidation changed from Cu20 to CuO between 75 and 85% relative humidity (RH) at 85 °C, leading to almost no reduction of Cu film thickness in spite of higher humidity.
| Original language | English |
|---|---|
| Title of host publication | 2018 IEEE International Interconnect Technology Conference, IITC 2018 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 112-114 |
| Number of pages | 3 |
| ISBN (Print) | 9781538643372 |
| DOIs | |
| Publication status | Published - 2018 Aug 8 |
| Event | 2018 IEEE International Interconnect Technology Conference, IITC 2018 - Santa Clara, United States Duration: 2018 Jun 4 → 2018 Jun 7 |
Other
| Other | 2018 IEEE International Interconnect Technology Conference, IITC 2018 |
|---|---|
| Country | United States |
| City | Santa Clara |
| Period | 18/6/4 → 18/6/7 |
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Keywords
- Cu metallization
- Cu oxidation
- lifetime
- XPS
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
Cite this
Oxidation Structure Change of Copper Surface Depending on Accelerated Humidity. / Gomasang, Ploybussara; Ogiue, Satoru; Ueno, Kazuyoshi; Yokogawa, Shinji.
2018 IEEE International Interconnect Technology Conference, IITC 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 112-114 8430461.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Oxidation Structure Change of Copper Surface Depending on Accelerated Humidity
AU - Gomasang, Ploybussara
AU - Ogiue, Satoru
AU - Ueno, Kazuyoshi
AU - Yokogawa, Shinji
PY - 2018/8/8
Y1 - 2018/8/8
N2 - Nonlinear dependence of sheet resistance change for Cu film on humidity was observed during temperature humidity storage (THS) test to evaluate the lifetime of Cu film in long-term storage in an environment. X-ray photoelectron spectroscopy (XPS) was adopted to investigate the change of oxidation structure depending on the humidity. Relative volume ratio of Cu, Cu20, and CuO was considered as the reason for the nonlinear dependence. The dominant reaction of oxidation changed from Cu20 to CuO between 75 and 85% relative humidity (RH) at 85 °C, leading to almost no reduction of Cu film thickness in spite of higher humidity.
AB - Nonlinear dependence of sheet resistance change for Cu film on humidity was observed during temperature humidity storage (THS) test to evaluate the lifetime of Cu film in long-term storage in an environment. X-ray photoelectron spectroscopy (XPS) was adopted to investigate the change of oxidation structure depending on the humidity. Relative volume ratio of Cu, Cu20, and CuO was considered as the reason for the nonlinear dependence. The dominant reaction of oxidation changed from Cu20 to CuO between 75 and 85% relative humidity (RH) at 85 °C, leading to almost no reduction of Cu film thickness in spite of higher humidity.
KW - Cu metallization
KW - Cu oxidation
KW - lifetime
KW - XPS
UR - http://www.scopus.com/inward/record.url?scp=85052496310&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85052496310&partnerID=8YFLogxK
U2 - 10.1109/IITC.2018.8430461
DO - 10.1109/IITC.2018.8430461
M3 - Conference contribution
SN - 9781538643372
SP - 112
EP - 114
BT - 2018 IEEE International Interconnect Technology Conference, IITC 2018
PB - Institute of Electrical and Electronics Engineers Inc.
ER -