Oxygen-deficient centers and excess si in buried oxide using photoluminescence spectroscopy

Engineering & Materials Science

• Photoluminescence spectroscopy 100%
• Photoluminescence 51%
• Oxides 40%
• Oxygen 38%
• Defects 10%
• Temperature 10%
• Synchrotron radiation 7%
• Light sources 5%
• Experiments 1%

Physics & Astronomy

• photoluminescence 33%
• oxides 29%
• oxygen 28%
• spectroscopy 24%
• implantation 16%
• life (durability) 9%
• dosage 9%
• defects 7%
• synchrotron radiation 4%
• light sources 3%
• preparation 3%
• temperature 2%
• room temperature 2%
• excitation 2%

Chemical Compounds

• Photoluminescence Spectroscopy 51%
• Photoluminescence 31%
• Oxide 25%
• Dioxygen 23%
• Dose 10%
• Molecular Cluster 8%
• Synchrotron Radiation 7%
• Implant 6%
• Ambient Reaction Temperature 3%