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Oxygen-deficient centers and excess si in buried oxide using photoluminescence spectroscopy
Hiroyuki Nishikawa
Research output
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Contribution to journal
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Article
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peer-review
44
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Dive into the research topics of 'Oxygen-deficient centers and excess si in buried oxide using photoluminescence spectroscopy'. Together they form a unique fingerprint.
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Engineering & Materials Science
Photoluminescence spectroscopy
100%
Photoluminescence
51%
Oxides
40%
Oxygen
38%
Defects
10%
Temperature
10%
Synchrotron radiation
7%
Light sources
5%
Experiments
1%
Physics & Astronomy
photoluminescence
33%
oxides
29%
oxygen
28%
spectroscopy
24%
implantation
16%
life (durability)
9%
dosage
9%
defects
7%
synchrotron radiation
4%
light sources
3%
preparation
3%
temperature
2%
room temperature
2%
excitation
2%
Chemical Compounds
Photoluminescence Spectroscopy
51%
Photoluminescence
31%
Oxide
25%
Dioxygen
23%
Dose
10%
Molecular Cluster
8%
Synchrotron Radiation
7%
Implant
6%
Ambient Reaction Temperature
3%