Patterning of permalloy thin films by means of electron-beam lithography and focused ion-beam milling

S. Getlawi, Michael Rudolf Koblischka, U. Hartmann, C. Richter, T. Sulzbach

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Focused ion-beam milling has been employed to structure magnetic nanoelements from 20 nm thick films of permalloy (Ni81Fe19). Rectangles are patterned into permalloy thin films grown on Si substrates by means of electron-beam lithography and focused ion-beam (FIB) milling down to 100 nm dimensions. In this study, we analyse the effect of the FIB milling parameters (ion current, spot size, dose) on the resulting magnetic domain structures. The ion currents have been varied between 10 pA and 10 000 pA; the dose of the ion beam used for milling was varied in order to achieve the best definition for the milled areas. The resulting edges of the permalloy structures are characterized by means of AFM. We find that a small ion dose does not affect the resulting magnetic domain patterns in the structures, so FIB milling can be applied to create high-quality permalloy nanostructures.

Original languageEnglish
Pages (from-to)699-704
Number of pages6
JournalSuperlattices and Microstructures
Volume44
Issue number4-5
DOIs
Publication statusPublished - 2008 Oct 1
Externally publishedYes

Fingerprint

Electron beam lithography
Focused ion beams
Permalloys (trademark)
lithography
ion beams
electron beams
Thin films
Magnetic domains
Ions
thin films
magnetic domains
dosage
ion currents
Magnetic structure
Thick films
Ion beams
rectangles
Nanostructures
thick films
atomic force microscopy

Keywords

  • Focused ion-beam milling
  • Magnetic properties
  • Permalloy

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Patterning of permalloy thin films by means of electron-beam lithography and focused ion-beam milling. / Getlawi, S.; Koblischka, Michael Rudolf; Hartmann, U.; Richter, C.; Sulzbach, T.

In: Superlattices and Microstructures, Vol. 44, No. 4-5, 01.10.2008, p. 699-704.

Research output: Contribution to journalArticle

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