Permittivity Increase of Yttriium-Doped HfO2 through Structural Phase Transformation

K.Kita K.Kita, K.Kyuno K.Kyuno, A.Torium A.Torium, Kentaro Kyuno

Research output: Contribution to journalArticle

Original languageEnglish
JournalApplied Physics Letters
Volume86
Publication statusPublished - 2005 Apr 1

Cite this