Permittivity Increase of Yttriium-Doped HfO2 through Structural Phase Transformation

K.Kita K.Kita, K.Kyuno K.Kyuno, A.Torium A.Torium, Kentaro Kyuno

Research output: Contribution to journalArticle

Original languageEnglish
JournalApplied Physics Letters
Volume86
Publication statusPublished - 2005 Apr 1

Cite this

Permittivity Increase of Yttriium-Doped HfO2 through Structural Phase Transformation. / K.Kita, K.Kita; K.Kyuno, K.Kyuno; A.Torium, A.Torium; Kyuno, Kentaro.

In: Applied Physics Letters, Vol. 86, 01.04.2005.

Research output: Contribution to journalArticle

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