Phase separation into nano-crystalline nitrides in ternary Ti-Si-N system via N implantation

Shinji Muraishi, Tatsuhiko Aizawa

Research output: Contribution to journalConference articlepeer-review

Fingerprint

Dive into the research topics of 'Phase separation into nano-crystalline nitrides in ternary Ti-Si-N system via N implantation'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy