Phase Separation into Nano-crystalline Nitrides in Ternary Ti-Si-N System via N Implantation.

S. Muraishi, T. Aizawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)3651-3654
JournalMaterials Science Forum,
Volume475-479 (2004)
Publication statusPublished - 1800

Cite this

Phase Separation into Nano-crystalline Nitrides in Ternary Ti-Si-N System via N Implantation. / Muraishi, S.; Aizawa, T.

In: Materials Science Forum, Vol. 475-479 (2004), 1800, p. 3651-3654.

Research output: Contribution to journalArticle

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