| Original language | English |
|---|---|
| Pages (from-to) | 3651-3654 |
| Journal | Materials Science Forum, |
| Volume | 475-479 (2004) |
| Publication status | Published - 1800 |
Phase Separation into Nano-crystalline Nitrides in Ternary Ti-Si-N System via N Implantation.
S. Muraishi, T. Aizawa
Research output: Contribution to journal › Article › peer-review