Photoluminescence and electron spin-resonance studies of defects in ion-implanted thermal SiO2 films

H. Nishikawa, H. Fukui, E. Watanabe, D. Ito, M. Takiyamal, A. Ieki, Y. Ohki

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)97-102
JournalMaterials Science Forum
Volume196-201
Publication statusPublished - 1995 Jan 1

Cite this

Nishikawa, H., Fukui, H., Watanabe, E., Ito, D., Takiyamal, M., Ieki, A., & Ohki, Y. (1995). Photoluminescence and electron spin-resonance studies of defects in ion-implanted thermal SiO2 films. Materials Science Forum, 196-201, 97-102.

Photoluminescence and electron spin-resonance studies of defects in ion-implanted thermal SiO2 films. / Nishikawa, H.; Fukui, H.; Watanabe, E.; Ito, D.; Takiyamal, M.; Ieki, A.; Ohki, Y.

In: Materials Science Forum, Vol. 196-201, 01.01.1995, p. 97-102.

Research output: Contribution to journalArticle

Nishikawa, H, Fukui, H, Watanabe, E, Ito, D, Takiyamal, M, Ieki, A & Ohki, Y 1995, 'Photoluminescence and electron spin-resonance studies of defects in ion-implanted thermal SiO2 films', Materials Science Forum, vol. 196-201, pp. 97-102.
Nishikawa, H. ; Fukui, H. ; Watanabe, E. ; Ito, D. ; Takiyamal, M. ; Ieki, A. ; Ohki, Y. / Photoluminescence and electron spin-resonance studies of defects in ion-implanted thermal SiO2 films. In: Materials Science Forum. 1995 ; Vol. 196-201. pp. 97-102.
@article{77cbda2e3f8f4d3e988a994f10166d22,
title = "Photoluminescence and electron spin-resonance studies of defects in ion-implanted thermal SiO2 films",
author = "H. Nishikawa and H. Fukui and E. Watanabe and D. Ito and M. Takiyamal and A. Ieki and Y. Ohki",
year = "1995",
month = "1",
day = "1",
language = "English",
volume = "196-201",
pages = "97--102",
journal = "Materials Science Forum",
issn = "0255-5476",
publisher = "Trans Tech Publications",

}

TY - JOUR

T1 - Photoluminescence and electron spin-resonance studies of defects in ion-implanted thermal SiO2 films

AU - Nishikawa, H.

AU - Fukui, H.

AU - Watanabe, E.

AU - Ito, D.

AU - Takiyamal, M.

AU - Ieki, A.

AU - Ohki, Y.

PY - 1995/1/1

Y1 - 1995/1/1

M3 - Article

VL - 196-201

SP - 97

EP - 102

JO - Materials Science Forum

JF - Materials Science Forum

SN - 0255-5476

ER -