Photoluminescence study of defect in ion-implanted thermal SiO2 films

H. Nishikawa, E. Watanabe, D. Ito, M. Takiyama, A.Ieki A.Ieki, Y. Ohki

Research output: Contribution to journal › Article › peer-review

Cite this

@article{5470ad62c1ec4d27becc7c9ceb9b2940,

title = "Photoluminescence study of defect in ion-implanted thermal SiO2 films",

author = "H. Nishikawa and E. Watanabe and D. Ito and M. Takiyama and A.Ieki A.Ieki and Y. Ohki",

year = "1995",

month = jul,

day = "1",

language = "English",

volume = "78",

pages = "842--846",

journal = "Default journal",

}