Photoluminescence study of defects in ion-implanted thermal SiO2 films

Hiroyuki Nishikawa, Eiki Watanabe, Daisuke Ito, Makoto Takiyama, Akihito Ieki, Yoshimichi Ohki

Research output: Contribution to journalArticlepeer-review

79 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Photoluminescence study of defects in ion-implanted thermal SiO<sub>2</sub> films'. Together they form a unique fingerprint.

Physics & Astronomy