Physical simulation and visualization of the Marangoni convection inside meniscus region under IPA vapor in wafer drying process

N. Ono, T. Yamada, S. Miura, T. Ishibashi, H. Matsuo, K. Watanabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Physical simulation and visualization of the Marangoni convection inside meniscus region under IPA vapor in wafer drying process'. Together they form a unique fingerprint.

Engineering & Materials Science