Plasma diagnosis in etching and ashing of diamond like carbon coating

T. Aizawa, N.T. Redationo

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)125-128
JournalProceddings of 6th SEATUC Conferece
Volume1
Publication statusPublished - 2012 Mar 6

Cite this

Plasma diagnosis in etching and ashing of diamond like carbon coating. / Aizawa, T.; Redationo, N.T.

In: Proceddings of 6th SEATUC Conferece, Vol. 1, 06.03.2012, p. 125-128.

Research output: Contribution to journalArticle

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