Plasma etcing with metallic masking for micro-patterning onto DLC coated mold-die

N.T. Redationo, E.E. Yunata, Tatsuhiko Aizawa

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)19-20
JournalProceedings of 4th Asian workshop on nano/micro forming technology
Volume1
Publication statusPublished - 2011 Oct 27

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