Position and size controlled fabrication of iron silicide nano-rods by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, F. Chu, M. Shimojo, M. Takeguchi, K. Mitsuishi, K. Furuya

Research output: Contribution to journalArticle

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)5635-5638
JournalJpn. J. Appl. Phys
Volume44
Publication statusPublished - 2005 Jan 1

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