Position and size controlled fabrication of nano-metals and semiconductors with fine focused electron beam

K. Furuya, K. Mitsuishi, M. Shimojo, M. Takeguchi

Research output: Contribution to journalArticle

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)381-386
JournalRev. Adv. Mater. Sci.
Volume5
Publication statusPublished - 2003 Jan 1

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