Position and size controlled fabrication of nano-metals and semiconductors with fine focused electron beam

K. Furuya, K. Mitsuishi, M. Shimojo, M. Takeguchi

Research output: Contribution to journalArticle

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)381-386
JournalRev. Adv. Mater. Sci.
Volume5
Publication statusPublished - 2003 Jan 1

Cite this

Position and size controlled fabrication of nano-metals and semiconductors with fine focused electron beam. / Furuya, K.; Mitsuishi, K.; Shimojo, M.; Takeguchi, M.

In: Rev. Adv. Mater. Sci., Vol. 5, 01.01.2003, p. 381-386.

Research output: Contribution to journalArticle

@article{e6e2919beace4c728f89815fbca6f4b8,
title = "Position and size controlled fabrication of nano-metals and semiconductors with fine focused electron beam",
author = "K. Furuya and K. Mitsuishi and M. Shimojo and M. Takeguchi",
year = "2003",
month = "1",
day = "1",
language = "English",
volume = "5",
pages = "381--386",
journal = "Rev. Adv. Mater. Sci.",

}

TY - JOUR

T1 - Position and size controlled fabrication of nano-metals and semiconductors with fine focused electron beam

AU - Furuya, K.

AU - Mitsuishi, K.

AU - Shimojo, M.

AU - Takeguchi, M.

PY - 2003/1/1

Y1 - 2003/1/1

M3 - Article

VL - 5

SP - 381

EP - 386

JO - Rev. Adv. Mater. Sci.

JF - Rev. Adv. Mater. Sci.

ER -