| Original language | English |
|---|---|
| Journal | Default journal |
| Publication status | Published - 2005 Oct 1 |
Position and size controlled fabrication of nm-sized structures with intense focused electron beam
K. Furuya, M. Shimojo, K. Mitsuishi, M. Takeguchi, M. Tanaka, M. Song
Research output: Contribution to journal › Article › peer-review