| Original language | English |
|---|---|
| Journal | Default journal |
| Publication status | Published - 2005 Oct 1 |
Cite this
Furuya, K., Shimojo, M., Mitsuishi, K., Takeguchi, M., Tanaka, M., & Song, M. (2005). Position and size controlled fabrication of nm-sized structures with intense focused electron beam. Default journal.