Position and size controlled fabrication of nm-sized structures with intense focused electron beam

K. Furuya, M. Shimojo, K. Mitsuishi, M. Takeguchi, M. Tanaka, M. Song

Research output: Contribution to journalArticle

Original languageEnglish
JournalDefault journal
Publication statusPublished - 2005 Oct 1

Cite this

Position and size controlled fabrication of nm-sized structures with intense focused electron beam. / Furuya, K.; Shimojo, M.; Mitsuishi, K.; Takeguchi, M.; Tanaka, M.; Song, M.

In: Default journal, 01.10.2005.

Research output: Contribution to journalArticle

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AU - Takeguchi, M.

AU - Tanaka, M.

AU - Song, M.

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