| Original language | English |
|---|---|
| Journal | Default journal |
| Publication status | Published - 2005 Oct 1 |
Cite this
Furuya, K., Shimojo, M., Mitsuishi, K., Takeguchi, M., Tanaka, M., & Song, M. (2005). Position and size controlled fabrication of nm-sized structures with intense focused electron beam. Default journal.
Position and size controlled fabrication of nm-sized structures with intense focused electron beam. / Furuya, K.; Shimojo, M.; Mitsuishi, K.; Takeguchi, M.; Tanaka, M.; Song, M.
In: Default journal, 01.10.2005.Research output: Contribution to journal › Article
Furuya, K, Shimojo, M, Mitsuishi, K, Takeguchi, M, Tanaka, M & Song, M 2005, 'Position and size controlled fabrication of nm-sized structures with intense focused electron beam', Default journal.
Furuya K, Shimojo M, Mitsuishi K, Takeguchi M, Tanaka M, Song M. Position and size controlled fabrication of nm-sized structures with intense focused electron beam. Default journal. 2005 Oct 1.
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T1 - Position and size controlled fabrication of nm-sized structures with intense focused electron beam
AU - Furuya, K.
AU - Shimojo, M.
AU - Mitsuishi, K.
AU - Takeguchi, M.
AU - Tanaka, M.
AU - Song, M.
PY - 2005/10/1
Y1 - 2005/10/1
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