Position controlled fabrication of metal nanostructures with focused electron beam

Kazuo Furuya; Masayuki Shimojo; Masaki Takeguchi; Minghui Song; Kazutaka Mitsuishi; Miyoko Tanaka

Position controlled fabrication of metal nanostructures with focused electron beam

Kazuo Furuya, Masayuki Shimojo, Masaki Takeguchi, Minghui Song, Kazutaka Mitsuishi, Miyoko Tanaka

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Electron beam induced deposition (EBID) was carried out with a field emission scanning electron microscope (FE-SEM) for the fabrication of position and size controlled metal nanostructures. A gas introduction system with a nozzle of 0.1 mm was developed. The flux of the gas for EBID was estimated to be approximately 2&times10^-4 Pa 1 s^-1. The position and size control was carried out careful manipulation of electron beam. The diameters of the nanostrucrures were ranged from 4 to 20 nm. Magnetic nanostructures were also obtained with iron containing precursor gas, Fe(CO)₅. Free-standing iron nano-antennas were examined by FE-TEM with electron holography. It was found that magnetic fields were leaked from the nanostruoture body and the whole was likely to be one "nano-magnet".

Original language	English
Title of host publication	TMS Annual Meeting
Pages	105-110
Number of pages	6
Volume	1
Publication status	Published - 2008
Externally published	Yes
Event	TMS 2008 Annual Meeting Supplemental: Materials Processing and Properties - New Orleans, LA Duration: 2008 Mar 9 → 2008 Mar 13

Other

Other	TMS 2008 Annual Meeting Supplemental: Materials Processing and Properties
City	New Orleans, LA
Period	08/3/9 → 08/3/13

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Keywords

Electron beam induced deposition
Electron holography
Iron carbide
Iron carbonyl
Nanorod

ASJC Scopus subject areas

Condensed Matter Physics
Mechanics of Materials
Metals and Alloys

Cite this

Furuya, K., Shimojo, M., Takeguchi, M., Song, M., Mitsuishi, K., & Tanaka, M. (2008). Position controlled fabrication of metal nanostructures with focused electron beam. In TMS Annual Meeting (Vol. 1, pp. 105-110)

@inproceedings{dc12be207cd84d7c8be4c475f7a81d61,

title = "Position controlled fabrication of metal nanostructures with focused electron beam",

abstract = "Electron beam induced deposition (EBID) was carried out with a field emission scanning electron microscope (FE-SEM) for the fabrication of position and size controlled metal nanostructures. A gas introduction system with a nozzle of 0.1 mm was developed. The flux of the gas for EBID was estimated to be approximately 2&times10-4 Pa 1 s-1. The position and size control was carried out careful manipulation of electron beam. The diameters of the nanostrucrures were ranged from 4 to 20 nm. Magnetic nanostructures were also obtained with iron containing precursor gas, Fe(CO)5. Free-standing iron nano-antennas were examined by FE-TEM with electron holography. It was found that magnetic fields were leaked from the nanostruoture body and the whole was likely to be one {"}nano-magnet{"}.",

keywords = "Electron beam induced deposition, Electron holography, Iron carbide, Iron carbonyl, Nanorod",

author = "Kazuo Furuya and Masayuki Shimojo and Masaki Takeguchi and Minghui Song and Kazutaka Mitsuishi and Miyoko Tanaka",

year = "2008",

language = "English",

isbn = "9780873397162",

volume = "1",

pages = "105--110",

booktitle = "TMS Annual Meeting",

note = "TMS 2008 Annual Meeting Supplemental: Materials Processing and Properties ; Conference date: 09-03-2008 Through 13-03-2008",

}

TY - GEN

T1 - Position controlled fabrication of metal nanostructures with focused electron beam

AU - Furuya, Kazuo

AU - Shimojo, Masayuki

AU - Takeguchi, Masaki

AU - Song, Minghui

AU - Mitsuishi, Kazutaka

AU - Tanaka, Miyoko

PY - 2008

Y1 - 2008

N2 - Electron beam induced deposition (EBID) was carried out with a field emission scanning electron microscope (FE-SEM) for the fabrication of position and size controlled metal nanostructures. A gas introduction system with a nozzle of 0.1 mm was developed. The flux of the gas for EBID was estimated to be approximately 2&times10-4 Pa 1 s-1. The position and size control was carried out careful manipulation of electron beam. The diameters of the nanostrucrures were ranged from 4 to 20 nm. Magnetic nanostructures were also obtained with iron containing precursor gas, Fe(CO)5. Free-standing iron nano-antennas were examined by FE-TEM with electron holography. It was found that magnetic fields were leaked from the nanostruoture body and the whole was likely to be one "nano-magnet".

AB - Electron beam induced deposition (EBID) was carried out with a field emission scanning electron microscope (FE-SEM) for the fabrication of position and size controlled metal nanostructures. A gas introduction system with a nozzle of 0.1 mm was developed. The flux of the gas for EBID was estimated to be approximately 2&times10-4 Pa 1 s-1. The position and size control was carried out careful manipulation of electron beam. The diameters of the nanostrucrures were ranged from 4 to 20 nm. Magnetic nanostructures were also obtained with iron containing precursor gas, Fe(CO)5. Free-standing iron nano-antennas were examined by FE-TEM with electron holography. It was found that magnetic fields were leaked from the nanostruoture body and the whole was likely to be one "nano-magnet".

KW - Electron beam induced deposition

KW - Electron holography

KW - Iron carbide

KW - Iron carbonyl

KW - Nanorod

UR - http://www.scopus.com/inward/record.url?scp=53849101068&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=53849101068&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:53849101068

SN - 9780873397162

VL - 1

SP - 105

EP - 110

BT - TMS Annual Meeting

T2 - TMS 2008 Annual Meeting Supplemental: Materials Processing and Properties

Y2 - 9 March 2008 through 13 March 2008

ER -

Position controlled fabrication of metal nanostructures with focused electron beam

Abstract

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Keywords

ASJC Scopus subject areas

Cite this

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