Position controlled fabrication of metal nanostructures with focused electron beam

Kazuo Furuya, Masayuki Shimojo, Masaki Takeguchi, Minghui Song, Kazutaka Mitsuishi, Miyoko Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Electron beam induced deposition (EBID) was carried out with a field emission scanning electron microscope (FE-SEM) for the fabrication of position and size controlled metal nanostructures. A gas introduction system with a nozzle of 0.1 mm was developed. The flux of the gas for EBID was estimated to be approximately 2&times10-4 Pa 1 s-1. The position and size control was carried out careful manipulation of electron beam. The diameters of the nanostrucrures were ranged from 4 to 20 nm. Magnetic nanostructures were also obtained with iron containing precursor gas, Fe(CO)5. Free-standing iron nano-antennas were examined by FE-TEM with electron holography. It was found that magnetic fields were leaked from the nanostruoture body and the whole was likely to be one "nano-magnet".

Original languageEnglish
Title of host publicationTMS2008 - 137th Annual Meeting and Exhibition Supplemental Proceedings
Subtitle of host publicationMaterials Processing and Properties
Pages105-110
Number of pages6
Publication statusPublished - 2008 Oct 20
EventTMS 2008 Annual Meeting Supplemental: Materials Processing and Properties - New Orleans, LA, United States
Duration: 2008 Mar 92008 Mar 13

Publication series

NameTMS Annual Meeting
Volume1

Conference

ConferenceTMS 2008 Annual Meeting Supplemental: Materials Processing and Properties
CountryUnited States
CityNew Orleans, LA
Period08/3/908/3/13

Keywords

  • Electron beam induced deposition
  • Electron holography
  • Iron carbide
  • Iron carbonyl
  • Nanorod

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Metals and Alloys

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  • Cite this

    Furuya, K., Shimojo, M., Takeguchi, M., Song, M., Mitsuishi, K., & Tanaka, M. (2008). Position controlled fabrication of metal nanostructures with focused electron beam. In TMS2008 - 137th Annual Meeting and Exhibition Supplemental Proceedings: Materials Processing and Properties (pp. 105-110). (TMS Annual Meeting; Vol. 1).