@inproceedings{dc12be207cd84d7c8be4c475f7a81d61,
title = "Position controlled fabrication of metal nanostructures with focused electron beam",
abstract = "Electron beam induced deposition (EBID) was carried out with a field emission scanning electron microscope (FE-SEM) for the fabrication of position and size controlled metal nanostructures. A gas introduction system with a nozzle of 0.1 mm was developed. The flux of the gas for EBID was estimated to be approximately 2×10-4 Pa 1 s-1. The position and size control was carried out careful manipulation of electron beam. The diameters of the nanostrucrures were ranged from 4 to 20 nm. Magnetic nanostructures were also obtained with iron containing precursor gas, Fe(CO)5. Free-standing iron nano-antennas were examined by FE-TEM with electron holography. It was found that magnetic fields were leaked from the nanostruoture body and the whole was likely to be one {"}nano-magnet{"}.",
keywords = "Electron beam induced deposition, Electron holography, Iron carbide, Iron carbonyl, Nanorod",
author = "Kazuo Furuya and Masayuki Shimojo and Masaki Takeguchi and Minghui Song and Kazutaka Mitsuishi and Miyoko Tanaka",
year = "2008",
month = oct,
day = "20",
language = "English",
isbn = "9780873397162",
series = "TMS Annual Meeting",
pages = "105--110",
booktitle = "TMS2008 - 137th Annual Meeting and Exhibition Supplemental Proceedings",
note = "TMS 2008 Annual Meeting Supplemental: Materials Processing and Properties ; Conference date: 09-03-2008 Through 13-03-2008",
}