Abstract
Electron beam induced deposition (EBID) was carried out with a field emission scanning electron microscope (FE-SEM) for the fabrication of position and size controlled metal nanostructures. A gas introduction system with a nozzle of 0.1 mm was developed. The flux of the gas for EBID was estimated to be approximately 2×10-4 Pa 1 s-1. The position and size control was carried out careful manipulation of electron beam. The diameters of the nanostrucrures were ranged from 4 to 20 nm. Magnetic nanostructures were also obtained with iron containing precursor gas, Fe(CO)5. Free-standing iron nano-antennas were examined by FE-TEM with electron holography. It was found that magnetic fields were leaked from the nanostruoture body and the whole was likely to be one "nano-magnet".
| Original language | English |
|---|---|
| Title of host publication | TMS Annual Meeting |
| Pages | 105-110 |
| Number of pages | 6 |
| Volume | 1 |
| Publication status | Published - 2008 |
| Externally published | Yes |
| Event | TMS 2008 Annual Meeting Supplemental: Materials Processing and Properties - New Orleans, LA Duration: 2008 Mar 9 → 2008 Mar 13 |
Other
| Other | TMS 2008 Annual Meeting Supplemental: Materials Processing and Properties |
|---|---|
| City | New Orleans, LA |
| Period | 08/3/9 → 08/3/13 |
Fingerprint
Keywords
- Electron beam induced deposition
- Electron holography
- Iron carbide
- Iron carbonyl
- Nanorod
ASJC Scopus subject areas
- Condensed Matter Physics
- Mechanics of Materials
- Metals and Alloys
Cite this
Position controlled fabrication of metal nanostructures with focused electron beam. / Furuya, Kazuo; Shimojo, Masayuki; Takeguchi, Masaki; Song, Minghui; Mitsuishi, Kazutaka; Tanaka, Miyoko.
TMS Annual Meeting. Vol. 1 2008. p. 105-110.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Position controlled fabrication of metal nanostructures with focused electron beam
AU - Furuya, Kazuo
AU - Shimojo, Masayuki
AU - Takeguchi, Masaki
AU - Song, Minghui
AU - Mitsuishi, Kazutaka
AU - Tanaka, Miyoko
PY - 2008
Y1 - 2008
N2 - Electron beam induced deposition (EBID) was carried out with a field emission scanning electron microscope (FE-SEM) for the fabrication of position and size controlled metal nanostructures. A gas introduction system with a nozzle of 0.1 mm was developed. The flux of the gas for EBID was estimated to be approximately 2×10-4 Pa 1 s-1. The position and size control was carried out careful manipulation of electron beam. The diameters of the nanostrucrures were ranged from 4 to 20 nm. Magnetic nanostructures were also obtained with iron containing precursor gas, Fe(CO)5. Free-standing iron nano-antennas were examined by FE-TEM with electron holography. It was found that magnetic fields were leaked from the nanostruoture body and the whole was likely to be one "nano-magnet".
AB - Electron beam induced deposition (EBID) was carried out with a field emission scanning electron microscope (FE-SEM) for the fabrication of position and size controlled metal nanostructures. A gas introduction system with a nozzle of 0.1 mm was developed. The flux of the gas for EBID was estimated to be approximately 2×10-4 Pa 1 s-1. The position and size control was carried out careful manipulation of electron beam. The diameters of the nanostrucrures were ranged from 4 to 20 nm. Magnetic nanostructures were also obtained with iron containing precursor gas, Fe(CO)5. Free-standing iron nano-antennas were examined by FE-TEM with electron holography. It was found that magnetic fields were leaked from the nanostruoture body and the whole was likely to be one "nano-magnet".
KW - Electron beam induced deposition
KW - Electron holography
KW - Iron carbide
KW - Iron carbonyl
KW - Nanorod
UR - http://www.scopus.com/inward/record.url?scp=53849101068&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=53849101068&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:53849101068
SN - 9780873397162
VL - 1
SP - 105
EP - 110
BT - TMS Annual Meeting
ER -