Post-deposition processes for nanostructures formed by electron beam induced deposition with Pt(PF3)4 precursor

M. Takeguchi, M. Shimojo, K. Furuya

Research output: Contribution to journalArticle

15 Citations (Scopus)
Original languageEnglish
Pages (from-to)439-442
JournalAppl. Phys. A
Volume93
Publication statusPublished - 2008 Jan 1

Cite this

Post-deposition processes for nanostructures formed by electron beam induced deposition with Pt(PF3)4 precursor. / Takeguchi, M.; Shimojo, M.; Furuya, K.

In: Appl. Phys. A, Vol. 93, 01.01.2008, p. 439-442.

Research output: Contribution to journalArticle

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