Post-deposition processes for nanostructures formed by electron beam induced deposition with Pt(PF3)4 precursor

M. Takeguchi, M. Shimojo, K. Furuya

Research output: Contribution to journal › Article › peer-review

Cite this

@article{461070f53cd745ff8e0fac5a16ec47cd,

title = "Post-deposition processes for nanostructures formed by electron beam induced deposition with Pt(PF3)4 precursor",

author = "M. Takeguchi and M. Shimojo and K. Furuya",

year = "2008",

month = jan,

day = "1",

language = "English",

volume = "93",

pages = "439--442",

journal = "Appl. Phys. A",

}