Precise characterization of nano-columnar DLC film by Raman spectroscopy and AFM

Tatsuhiko Aizawa, Takuhiko Uematsu

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)129-133
JournalProceedings of 6th SEATUC Conference
Volume1
Publication statusPublished - 2012 Mar 6

Cite this