Precise characterization of nano-columnar DLC film by Raman spectroscopy and AFM

Tatsuhiko Aizawa, Takuhiko Uematsu

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)129-133
JournalProceedings of 6th SEATUC Conference
Volume1
Publication statusPublished - 2012 Mar 6

Cite this

Precise characterization of nano-columnar DLC film by Raman spectroscopy and AFM. / Aizawa, Tatsuhiko; Uematsu, Takuhiko.

In: Proceedings of 6th SEATUC Conference, Vol. 1, 06.03.2012, p. 129-133.

Research output: Contribution to journalArticle

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