Prediction of pressure dependent rate constant for the reaction, SiH4(g)→SiH3(g)+H(g), using RRKM theory aided by ab-initio MO

Nagahiro Saito; Mitsuhito Hirota; Takahiro Ishizaki; Akio Fuwa

doi:10.2320/jinstmet1952.63.4_520

Prediction of pressure dependent rate constant for the reaction, SiH₄(g)→SiH₃(g)+H(g), using RRKM theory aided by ab-initio MO

Nagahiro Saito, Mitsuhito Hirota, Takahiro Ishizaki, Akio Fuwa

Research output: Contribution to journal › Article

1 Citation (Scopus)

Abstract

The pressure dependent rate constant for the reaction, SiH₄(g)→SiH₃(g)+H was predicted using the Rice-Ramspger-Kassel-Marcus theory aided by Ab-initio molecular orbital (MO). It was calculated under conditions in which the temperatures were from 600 to 1500 K intervals of 100 K. The Arrhenius type rate expression was shown.

Original language	English
Pages (from-to)	520-526
Number of pages	7
Journal	Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
Volume	63
Issue number	4
DOIs	https://doi.org/10.2320/jinstmet1952.63.4_520
Publication status	Published - 1999 Jan 1

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ASJC Scopus subject areas

Condensed Matter Physics
Mechanics of Materials
Metals and Alloys
Materials Chemistry

Cite this

Saito, N., Hirota, M., Ishizaki, T., & Fuwa, A. (1999). Prediction of pressure dependent rate constant for the reaction, SiH₄(g)→SiH₃(g)+H(g), using RRKM theory aided by ab-initio MO. Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals, 63(4), 520-526. https://doi.org/10.2320/jinstmet1952.63.4_520

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10.2320/jinstmet1952.63.4_520