Preparation and Characterization of a New Ge-Sb-Te Thin Film

Tomohiro Suzuki, Takahiro Ishizaki, Satoru Mori, Akio Fuwa

Research output: Contribution to journalArticle

Abstract

Ge 10Sb 67.5Te 22.5 thin films were prepared by RF magnetron sputtering from a single high purity Ge 10Sb 67.5Te 22.5 target under the following condition: RF power: 30 W, Ar pressure: 1.067 Pa, Ar flow: 9 ccm, substrate temperature: room temperature (water cooling), distance between target and substrate: 7 cm, and sputtering time: 10∼40 min. Although the as-deposited film was amorphous, annealing for 30 min at 573 K allowed it to be crystallized. The crystallization temperature and the activation energy of Ge 10Sb 67.5Te 22.5 thin film were around 463 K and 2.50 eV, respectively, while those of Ge 2Sb 2Te 5 thin film, prepared under the same conditions as stated above, were around 408 K and 2.04 eV, respectively. The difference of optical constants between crystalline and amorphous phases of Ge 10Sb 67.5Te 22.5 and Ge 2Sb 2Te 5 thin films were -0.9 + i0.93 and -0.77 + i0.67, respectively, in a blue laser area, i.e., wavelength 405 nm.

Original languageEnglish
Pages (from-to)90-93
Number of pages4
JournalNippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
Volume68
Issue number2
Publication statusPublished - 2004 Feb
Externally publishedYes

Fingerprint

Thin films
preparation
thin films
liquid cooling
Optical constants
Cooling water
Amorphous films
Substrates
Crystallization
Magnetron sputtering
Temperature
Sputtering
magnetron sputtering
purity
Activation energy
sputtering
Annealing
crystallization
activation energy
Crystalline materials

Keywords

  • Activation energy
  • Germanium-antimony- tellurium
  • Optical constant
  • Phase change optical disk
  • Sputtering

ASJC Scopus subject areas

  • Metals and Alloys

Cite this

Preparation and Characterization of a New Ge-Sb-Te Thin Film. / Suzuki, Tomohiro; Ishizaki, Takahiro; Mori, Satoru; Fuwa, Akio.

In: Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals, Vol. 68, No. 2, 02.2004, p. 90-93.

Research output: Contribution to journalArticle

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