The preparation of tantalum oxide thin film by the sol-gel method is discussed. The conditions of the film growth are investigated carefully to avoid pinholes and cracks. In particular, the effect of hydrochloric acid added to the sol solution is clarified. It was found by TEM observation that the rapid degradation of the breakdown voltage was due to pinholes created during crystallization process.
|Number of pages||10|
|Journal||Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi)|
|Publication status||Published - 1993 Sep|
ASJC Scopus subject areas
- Electrical and Electronic Engineering