Preparation and Wear Resistance of TiBC, TiBN, SiNx, Single layer Film and TiBC-SiNx and TiBN-SiNx Double Layer Film by Thermal Plasma CVD

Y. Fuji, S. Shimada, H. Kiyono

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)287-293
JournalJ. Jpn. Soc. Powder Powder Metallurgy
Volume54
Publication statusPublished - 2007 Jan 1

Cite this

@article{38075085535a4fe5a07740a76835d73b,
title = "Preparation and Wear Resistance of TiBC, TiBN, SiNx, Single layer Film and TiBC-SiNx and TiBN-SiNx Double Layer Film by Thermal Plasma CVD",
author = "Y. Fuji and S. Shimada and H. Kiyono",
year = "2007",
month = "1",
day = "1",
language = "English",
volume = "54",
pages = "287--293",
journal = "J. Jpn. Soc. Powder Powder Metallurgy",

}

TY - JOUR

T1 - Preparation and Wear Resistance of TiBC, TiBN, SiNx, Single layer Film and TiBC-SiNx and TiBN-SiNx Double Layer Film by Thermal Plasma CVD

AU - Fuji, Y.

AU - Shimada, S.

AU - Kiyono, H.

PY - 2007/1/1

Y1 - 2007/1/1

M3 - Article

VL - 54

SP - 287

EP - 293

JO - J. Jpn. Soc. Powder Powder Metallurgy

JF - J. Jpn. Soc. Powder Powder Metallurgy

ER -