Preparation and Wear Resistance of TiBC, TiBN, SiNx, Single layer Film and TiBC-SiNx and TiBN-SiNx Double Layer Film by Thermal Plasma CVD

Y. Fuji, S. Shimada, H. Kiyono

Research output: Contribution to journalArticle

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)287-293
JournalJ. Jpn. Soc. Powder Powder Metallurgy
Volume54
Publication statusPublished - 2007 Jan 1

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