Preparation of ferrite-coated magnetic force microscopy cantilevers

M. Kirsch, Michael Rudolf Koblischka, J. D. Wei, U. Hartmann

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Thin films of two types of ferrites, NiZn Fe2 O4 spinel ferrite and Co2 Z -type hexaferrite (Ba3 Co2 Fe24 O41) were prepared by rf sputtering on Si (1 0 0) and (1 1 1) substrates. Films with a thickness up to 100 nm were prepared for analysis purposes, enabling the optimization of the sputter process. The purpose of these ferrite thin films is the preparation of magnetic force microscopy (MFM) cantilever coatings for use with a high-frequency magnetic force microscope (HF-MFM). As a basis for these probes, the authors employ commercial, micromachined silicon cantilevers. The typical thickness of the coatings was 50 nm. The MFM imaging properties of both types of ferrite-coated cantilevers are discussed in detail.

Original languageEnglish
Pages (from-to)1679-1683
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume25
Issue number5
DOIs
Publication statusPublished - 2007 Sep 28
Externally publishedYes

    Fingerprint

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this