Abstract
Thin-films of (Ni,Zn)Fe2O4 were grown by means of RF sputtering on Si (100) and (111) substrates. Films with a thickness up to 100 nm were prepared for analysis purposes, enabling the optimization of the sputter process. The purpose of these ferrite thin films is the preparation of MFM cantilever-coatings for use with a high-frequency magnetic force microscope (HF-MFM). As a basis for these probes, we employ commercial, micromachined silicon cantilevers which exhibit (100)-oriented Si surfaces on the shank, and (111)-oriented surfaces on the pyramid-like tip end. The substrates were not additionally heated during the evaporation. A slow cooling enabled the grain growth, so that grains of about 30 - 50 nm diameter were produced. Hysteresis loops of the (Ni,Zn)Fe2O4 films were obtained using a VSM magnetometer at room temperature. The films were found to exhibit the behaviour of a soft magnetic material, which is well suited for the HF-MFM imaging of harddisk recording heads up to a carrier frequency of 2 GHz. The material properties of the (Ni,Zn)Fe2O4 thin films are characterized by means of transmission electron microscopy (TEM). An electron backscatter diffraction (EBSD) analysis of the individual grain orientations is carried out on this type of ferrite films. This enables a determination of the magnetization direction of individual grains, which contributes to the modelling of the tip properties. The current goal for further research is the preparation of even thinner ferrite coatings in order to maintain a small tip radius at the tip end of the cantilever, which is an important factor for the achievable spatial resolution of a MFM image.
| Original language | English |
|---|---|
| Title of host publication | Magnetic Thin Films |
| Subtitle of host publication | Properties, Performance and Applications |
| Publisher | Nova Science Publishers, Inc. |
| Pages | 363-379 |
| Number of pages | 17 |
| ISBN (Print) | 9781612093024 |
| Publication status | Published - 2011 Apr 1 |
| Externally published | Yes |
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Keywords
- Cantilevers
- Ferrite thin films
- MFM
- Silicon
ASJC Scopus subject areas
- Materials Science(all)
Cite this
Preparation of thin ferrite films on silicon substrates. / Koblischka, Michael Rudolf; Koblischka-Veneva, Anjela Dimitrova; Skumryev, V.; Hartmann, U.
Magnetic Thin Films: Properties, Performance and Applications. Nova Science Publishers, Inc., 2011. p. 363-379.Research output: Chapter in Book/Report/Conference proceeding › Chapter
}
TY - CHAP
T1 - Preparation of thin ferrite films on silicon substrates
AU - Koblischka, Michael Rudolf
AU - Koblischka-Veneva, Anjela Dimitrova
AU - Skumryev, V.
AU - Hartmann, U.
PY - 2011/4/1
Y1 - 2011/4/1
N2 - Thin-films of (Ni,Zn)Fe2O4 were grown by means of RF sputtering on Si (100) and (111) substrates. Films with a thickness up to 100 nm were prepared for analysis purposes, enabling the optimization of the sputter process. The purpose of these ferrite thin films is the preparation of MFM cantilever-coatings for use with a high-frequency magnetic force microscope (HF-MFM). As a basis for these probes, we employ commercial, micromachined silicon cantilevers which exhibit (100)-oriented Si surfaces on the shank, and (111)-oriented surfaces on the pyramid-like tip end. The substrates were not additionally heated during the evaporation. A slow cooling enabled the grain growth, so that grains of about 30 - 50 nm diameter were produced. Hysteresis loops of the (Ni,Zn)Fe2O4 films were obtained using a VSM magnetometer at room temperature. The films were found to exhibit the behaviour of a soft magnetic material, which is well suited for the HF-MFM imaging of harddisk recording heads up to a carrier frequency of 2 GHz. The material properties of the (Ni,Zn)Fe2O4 thin films are characterized by means of transmission electron microscopy (TEM). An electron backscatter diffraction (EBSD) analysis of the individual grain orientations is carried out on this type of ferrite films. This enables a determination of the magnetization direction of individual grains, which contributes to the modelling of the tip properties. The current goal for further research is the preparation of even thinner ferrite coatings in order to maintain a small tip radius at the tip end of the cantilever, which is an important factor for the achievable spatial resolution of a MFM image.
AB - Thin-films of (Ni,Zn)Fe2O4 were grown by means of RF sputtering on Si (100) and (111) substrates. Films with a thickness up to 100 nm were prepared for analysis purposes, enabling the optimization of the sputter process. The purpose of these ferrite thin films is the preparation of MFM cantilever-coatings for use with a high-frequency magnetic force microscope (HF-MFM). As a basis for these probes, we employ commercial, micromachined silicon cantilevers which exhibit (100)-oriented Si surfaces on the shank, and (111)-oriented surfaces on the pyramid-like tip end. The substrates were not additionally heated during the evaporation. A slow cooling enabled the grain growth, so that grains of about 30 - 50 nm diameter were produced. Hysteresis loops of the (Ni,Zn)Fe2O4 films were obtained using a VSM magnetometer at room temperature. The films were found to exhibit the behaviour of a soft magnetic material, which is well suited for the HF-MFM imaging of harddisk recording heads up to a carrier frequency of 2 GHz. The material properties of the (Ni,Zn)Fe2O4 thin films are characterized by means of transmission electron microscopy (TEM). An electron backscatter diffraction (EBSD) analysis of the individual grain orientations is carried out on this type of ferrite films. This enables a determination of the magnetization direction of individual grains, which contributes to the modelling of the tip properties. The current goal for further research is the preparation of even thinner ferrite coatings in order to maintain a small tip radius at the tip end of the cantilever, which is an important factor for the achievable spatial resolution of a MFM image.
KW - Cantilevers
KW - Ferrite thin films
KW - MFM
KW - Silicon
UR - http://www.scopus.com/inward/record.url?scp=84892822143&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84892822143&partnerID=8YFLogxK
M3 - Chapter
AN - SCOPUS:84892822143
SN - 9781612093024
SP - 363
EP - 379
BT - Magnetic Thin Films
PB - Nova Science Publishers, Inc.
ER -