Preparation of thin ferrite films on silicon using RF sputtering

M. R. Koblischka; M. Kirsch; M. Brust; A. Koblischka-Veneva; U. Hartmann

doi:10.1002/pssa.200723608

Preparation of thin ferrite films on silicon using RF sputtering

M. R. Koblischka, M. Kirsch, M. Brust, A. Koblischka-Veneva, U. Hartmann

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Thin-films of Ni _xZn _1-x:Fe ₂O ₄ [(Ni,Zn)-ferrite] are grown by means of RF sputtering on Si(100) and (111) substrates, corresponding to the orientation of Si cantilevers for AFM/MFM measurements. We Find that the ferrite can be sputtered directly onto the Si surfaces, but an additional annealing step is required to obtain a purely polycrystalline, soft magnetic film. The inicrostructure of the films is investigated employing transmission electron microscopy, electron baclcscatter diffraction and magnetic force microscopy.

Original language	English
Pages (from-to)	1783-1786
Number of pages	4
Journal	Physica Status Solidi (A) Applications and Materials Science
Volume	205
Issue number	8
DOIs	https://doi.org/10.1002/pssa.200723608
Publication status	Published - 2008 Aug
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Electrical and Electronic Engineering
Materials Chemistry

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10.1002/pssa.200723608

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abstract = "Thin-films of Ni xZn 1-x:Fe 2O 4 [(Ni,Zn)-ferrite] are grown by means of RF sputtering on Si(100) and (111) substrates, corresponding to the orientation of Si cantilevers for AFM/MFM measurements. We Find that the ferrite can be sputtered directly onto the Si surfaces, but an additional annealing step is required to obtain a purely polycrystalline, soft magnetic film. The inicrostructure of the films is investigated employing transmission electron microscopy, electron baclcscatter diffraction and magnetic force microscopy.",

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AU - Koblischka, M. R.

AU - Kirsch, M.

AU - Brust, M.

AU - Koblischka-Veneva, A.

AU - Hartmann, U.

PY - 2008/8

Y1 - 2008/8

N2 - Thin-films of Ni xZn 1-x:Fe 2O 4 [(Ni,Zn)-ferrite] are grown by means of RF sputtering on Si(100) and (111) substrates, corresponding to the orientation of Si cantilevers for AFM/MFM measurements. We Find that the ferrite can be sputtered directly onto the Si surfaces, but an additional annealing step is required to obtain a purely polycrystalline, soft magnetic film. The inicrostructure of the films is investigated employing transmission electron microscopy, electron baclcscatter diffraction and magnetic force microscopy.

AB - Thin-films of Ni xZn 1-x:Fe 2O 4 [(Ni,Zn)-ferrite] are grown by means of RF sputtering on Si(100) and (111) substrates, corresponding to the orientation of Si cantilevers for AFM/MFM measurements. We Find that the ferrite can be sputtered directly onto the Si surfaces, but an additional annealing step is required to obtain a purely polycrystalline, soft magnetic film. The inicrostructure of the films is investigated employing transmission electron microscopy, electron baclcscatter diffraction and magnetic force microscopy.

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Preparation of thin ferrite films on silicon using RF sputtering

Abstract

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