Original language | English |
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Pages (from-to) | 15-21 |
Journal | Thin Solid Films |
Volume | 249 |
Publication status | Published - 1994 Sep 1 |
Properties of Liquid Phase Deposited SiO2 Films for Interlayer Dielectrics in Ultra-large-scale Integrated Circuit Multilevel Interconnections
T.Homma T.Homma, Y.Murao Y.Murao, Tetsuya Homma
Research output: Contribution to journal › Article › peer-review
21
Citations
(Scopus)