Properties of Liquid Phase Deposited SiO2 Films for Interlayer Dielectrics in Ultra-large-scale Integrated Circuit Multilevel Interconnections

T.Homma T.Homma, Y.Murao Y.Murao, Tetsuya Homma

Research output: Contribution to journalArticle

20 Citations (Scopus)
Original languageEnglish
Pages (from-to)15-21
JournalThin Solid Films
Volume249
Publication statusPublished - 1994 Sep 1

Cite this

Properties of Liquid Phase Deposited SiO2 Films for Interlayer Dielectrics in Ultra-large-scale Integrated Circuit Multilevel Interconnections. / T.Homma, T.Homma; Y.Murao, Y.Murao; Homma, Tetsuya.

In: Thin Solid Films, Vol. 249, 01.09.1994, p. 15-21.

Research output: Contribution to journalArticle

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