Properties of liquid-phase-deposited SiO2 films for interlayer dielectrics in ultralarge-scale integrated circuit multilevel interconnections

Tetsuya Homma, Yukinobu Murao

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

Fingerprint Dive into the research topics of 'Properties of liquid-phase-deposited SiO<sub>2</sub> films for interlayer dielectrics in ultralarge-scale integrated circuit multilevel interconnections'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science