Proton Beam Writer for manufacturing in Shibaura Institute of Technology

E. Yoshida, H. Nishikawa, Y. Furuta, Y. Seki, R. Tsuchiya

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)118
JournalBook of Abstracts, 11th International Conference on Nuclear Microprobe Technology and Applications, 20-25 July, 2008, Debrecen, Hungary
Publication statusPublished - 2008 Jul 24

Cite this

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title = "Proton Beam Writer for manufacturing in Shibaura Institute of Technology",
author = "E. Yoshida and H. Nishikawa and Y. Furuta and Y. Seki and R. Tsuchiya",
year = "2008",
month = "7",
day = "24",
language = "English",
pages = "118",
journal = "Book of Abstracts, 11th International Conference on Nuclear Microprobe Technology and Applications, 20-25 July, 2008, Debrecen, Hungary",

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TY - JOUR

T1 - Proton Beam Writer for manufacturing in Shibaura Institute of Technology

AU - Yoshida, E.

AU - Nishikawa, H.

AU - Furuta, Y.

AU - Seki, Y.

AU - Tsuchiya, R.

PY - 2008/7/24

Y1 - 2008/7/24

M3 - Article

SP - 118

JO - Book of Abstracts, 11th International Conference on Nuclear Microprobe Technology and Applications, 20-25 July, 2008, Debrecen, Hungary

JF - Book of Abstracts, 11th International Conference on Nuclear Microprobe Technology and Applications, 20-25 July, 2008, Debrecen, Hungary

ER -