Proton Beam Writer for manufacturing　in Shibaura Institute of Technology

E. Yoshida, H. Nishikawa, Y. Furuta, Y. Seki, R. Tsuchiya

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	118
Journal	Book of Abstracts, 11th International Conference on Nuclear Microprobe Technology and Applications, 20-25 July, 2008, Debrecen, Hungary
Publication status	Published - 2008 Jul 24

Cite this

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title = "Proton Beam Writer for manufacturing　in Shibaura Institute of Technology",

author = "E. Yoshida and H. Nishikawa and Y. Furuta and Y. Seki and R. Tsuchiya",

year = "2008",

month = jul,

day = "24",

language = "English",

pages = "118",

journal = "Book of Abstracts, 11th International Conference on Nuclear Microprobe Technology and Applications, 20-25 July, 2008, Debrecen, Hungary",

}

TY - JOUR

T1 - Proton Beam Writer for manufacturing　in Shibaura Institute of Technology

AU - Yoshida, E.

AU - Nishikawa, H.

AU - Furuta, Y.

AU - Seki, Y.

AU - Tsuchiya, R.

PY - 2008/7/24

Y1 - 2008/7/24

M3 - Article

SP - 118

JO - Book of Abstracts, 11th International Conference on Nuclear Microprobe Technology and Applications, 20-25 July, 2008, Debrecen, Hungary

JF - Book of Abstracts, 11th International Conference on Nuclear Microprobe Technology and Applications, 20-25 July, 2008, Debrecen, Hungary

ER -