Proton beam writing micro fabrication system for micro chemical devices

Phi Nguyen Truong, Ryo Teshima, Tadahiro Hasegawa, Hiroyuki Nishikawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The authors have been developing a flexible micro fabrication system using Proton Beam Writing (PBW) for micro chemical devices. The system enable to fabricate the various kind of shape in XY stage, increase the productivity and meet the requirement of fabricate in the centimeter ranger. The flexible system transforms licensed 3D CAD (Computer Aided Design) data to pattern data that is used to control the XY stage of the PBW system. The experimental results showed a brightly future of proton beam in micro fabrication.

Original languageEnglish
Title of host publication2010 International Symposium on Micro-NanoMechatronics and Human Science
Subtitle of host publicationFrom Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010
Pages435-440
Number of pages6
DOIs
Publication statusPublished - 2010 Dec 1
Event21st Annual Symposium on Micro-Nano Mechatronics and Human Science, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010 - Nagoya, Japan
Duration: 2010 Nov 72010 Nov 10

Publication series

Name2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010

Conference

Conference21st Annual Symposium on Micro-Nano Mechatronics and Human Science, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010
CountryJapan
CityNagoya
Period10/11/710/11/10

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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  • Cite this

    Truong, P. N., Teshima, R., Hasegawa, T., & Nishikawa, H. (2010). Proton beam writing micro fabrication system for micro chemical devices. In 2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010 (pp. 435-440). [5669508] (2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010). https://doi.org/10.1109/MHS.2010.5669508