| Original language | English |
|---|---|
| Pages (from-to) | 5517-5521 |
| Journal | Jpn. J. Appl. Phys |
| Volume | 45 |
| Publication status | Published - 2006 Jan 1 |
Proximity effect in electron beam-induced deposition
K. Mitsuishi, M. Shimojo, M. Takeguchi, M. Tanaka, K. Furuya
Research output: Contribution to journal › Article › peer-review
14
Citations
(Scopus)