Proximity effect in electron beam-induced deposition

K. Mitsuishi, M. Shimojo, M. Takeguchi, M. Tanaka, K. Furuya

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)
Original languageEnglish
Pages (from-to)5517-5521
JournalJpn. J. Appl. Phys
Volume45
Publication statusPublished - 2006 Jan 1

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