Proximity effect in electron beam-induced deposition

K. Mitsuishi, M. Shimojo, M. Takeguchi, M. Tanaka, K. Furuya

Research output: Contribution to journalArticle

12 Citations (Scopus)
Original languageEnglish
Pages (from-to)5517-5521
JournalJpn. J. Appl. Phys
Volume45
Publication statusPublished - 2006 Jan 1

Cite this

Mitsuishi, K., Shimojo, M., Takeguchi, M., Tanaka, M., & Furuya, K. (2006). Proximity effect in electron beam-induced deposition. Jpn. J. Appl. Phys, 45, 5517-5521.