Radial distribution of temperature gradients in growing CZ-Si crystals and its application to the prediction of microdefect distribution

K. Kitamura, J. Furukawa, Y. Nakada, N. Ono, Y. Shimanuki, A. M. Eidenzon, N. I. Puzanov, D. N. Puzanov

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

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