Raman spectroscopic stress evaluation of femtosecond-laser-modified region inside 4H-SIC

Minoru Yamamoto, Manato Deki, Tomonori Takahashi, Takuro Tomita, Tatsuya Okada, Shigeki Matsuo, Shuichi Hashimoto, Makoto Yamaguchi, Kei Nakagawa, Nobutomo Uehara, Masaru Kamano

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Engineering & Materials Science

Physics & Astronomy