Recent Progress in Graphene Processes for Metallization and RF Applications

Kazuyoshi Ueno

doi:10.1109/IITC52079.2022.9881312

Recent Progress in Graphene Processes for Metallization and RF Applications

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Research on graphene processes for the applications to interconnects and electrodes, such as graphene caps, direct deposition of multi-layer graphene, and stable intercalation doping, is steadily progressing. Furthermore, attention will be paid to the application of graphene, which has a high kinetic inductance, to RF devices. Here, I will give an overview of recent research trends toward the practical application of graphene and discuss the issues.

Original language	English
Title of host publication	2022 IEEE International Interconnect Technology Conference, IITC 2022
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	37-39
Number of pages	3
ISBN (Electronic)	9781665486460
DOIs	https://doi.org/10.1109/IITC52079.2022.9881312
Publication status	Published - 2022
Event	2022 IEEE International Interconnect Technology Conference, IITC 2022 - San Jose, United States Duration: 2022 Jun 27 → 2022 Jun 30

Publication series

Name	2022 IEEE International Interconnect Technology Conference, IITC 2022

Conference

Conference	2022 IEEE International Interconnect Technology Conference, IITC 2022
Country/Territory	United States
City	San Jose
Period	22/6/27 → 22/6/30

Keywords

cap
CVD
graphene
inductor
intercalation doping
interconnect
kinetic inductance
solid-phase deposition

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Safety, Risk, Reliability and Quality
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/IITC52079.2022.9881312

Cite this

Recent Progress in Graphene Processes for Metallization and RF Applications. / Ueno, Kazuyoshi.

2022 IEEE International Interconnect Technology Conference, IITC 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 37-39 (2022 IEEE International Interconnect Technology Conference, IITC 2022).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ueno, K 2022, Recent Progress in Graphene Processes for Metallization and RF Applications. in 2022 IEEE International Interconnect Technology Conference, IITC 2022. 2022 IEEE International Interconnect Technology Conference, IITC 2022, Institute of Electrical and Electronics Engineers Inc., pp. 37-39, 2022 IEEE International Interconnect Technology Conference, IITC 2022, San Jose, United States, 22/6/27. https://doi.org/10.1109/IITC52079.2022.9881312

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title = "Recent Progress in Graphene Processes for Metallization and RF Applications",

abstract = "Research on graphene processes for the applications to interconnects and electrodes, such as graphene caps, direct deposition of multi-layer graphene, and stable intercalation doping, is steadily progressing. Furthermore, attention will be paid to the application of graphene, which has a high kinetic inductance, to RF devices. Here, I will give an overview of recent research trends toward the practical application of graphene and discuss the issues.",

keywords = "cap, CVD, graphene, inductor, intercalation doping, interconnect, kinetic inductance, solid-phase deposition",

author = "Kazuyoshi Ueno",

note = "Funding Information: This work was supported by JST CREST Grant No. JPMJCR1532, NEDO LEAP, JSPS KAKENHI 26420319, 18K94289. I would like to thank all those who cooperated in the research introduced here. Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE International Interconnect Technology Conference, IITC 2022 ; Conference date: 27-06-2022 Through 30-06-2022",

year = "2022",

doi = "10.1109/IITC52079.2022.9881312",

language = "English",

series = "2022 IEEE International Interconnect Technology Conference, IITC 2022",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "2022 IEEE International Interconnect Technology Conference, IITC 2022",

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AU - Ueno, Kazuyoshi

N1 - Funding Information: This work was supported by JST CREST Grant No. JPMJCR1532, NEDO LEAP, JSPS KAKENHI 26420319, 18K94289. I would like to thank all those who cooperated in the research introduced here. Publisher Copyright: © 2022 IEEE.

PY - 2022

Y1 - 2022

N2 - Research on graphene processes for the applications to interconnects and electrodes, such as graphene caps, direct deposition of multi-layer graphene, and stable intercalation doping, is steadily progressing. Furthermore, attention will be paid to the application of graphene, which has a high kinetic inductance, to RF devices. Here, I will give an overview of recent research trends toward the practical application of graphene and discuss the issues.

AB - Research on graphene processes for the applications to interconnects and electrodes, such as graphene caps, direct deposition of multi-layer graphene, and stable intercalation doping, is steadily progressing. Furthermore, attention will be paid to the application of graphene, which has a high kinetic inductance, to RF devices. Here, I will give an overview of recent research trends toward the practical application of graphene and discuss the issues.

KW - cap

KW - CVD

KW - graphene

KW - inductor

KW - intercalation doping

KW - interconnect

KW - kinetic inductance

KW - solid-phase deposition

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T3 - 2022 IEEE International Interconnect Technology Conference, IITC 2022

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EP - 39

BT - 2022 IEEE International Interconnect Technology Conference, IITC 2022

PB - Institute of Electrical and Electronics Engineers Inc.

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Y2 - 27 June 2022 through 30 June 2022

ER -

Recent Progress in Graphene Processes for Metallization and RF Applications

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

Access to Document

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