Abstract
A recessed gate AlGaN/GaN modulation-doped field-effect transistor (MODFET) has been grown on a sapphire substrate by metalorganic chemical vapor deposition. The two-dimensional electron gas mobility as high as 9260 cm2/Vs with the sheet carrier density 4.8× 1012cm-2 was measured at 4.6 K for the AlGaN/GaN heterostructure on the sapphire substrate. The recessed gate device showed the maximum extrinsic transconductance 146 mS/mm and drain-source current 900 mA/mm for the AlGaN/GaN MODFET with a gate length 2.1 μm at 25 °C. At an elevated temperature of 350 °C, the maximum extrinsic transconductance and drain-source current were 62 mS/mm and 347 mA/mm, respectively.
Original language | English |
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Pages (from-to) | 121-123 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 76 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2000 Jan 3 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)