Relationship between electrical resistivity and electrostatic force of alumina electrostatic chuck

Toshiya Watanabe, Tetuo Kitabayashi, Chiaki Nakayama

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

Alumina electrostatic chucks having various electrical resistivities were fabricated by changing the amount of TiO2 and heat treatment conditions. Experimental data on electrostatic force and its response time were obtained for the fabricated electrostatic chucks. The experimental results are compared with the theoretically predicted results utilizing the equivalent circuit model, and the relationship between electrical resistivity and electrostatic force characteristics is discussed.

Original languageEnglish
Pages (from-to)864-871
Number of pages8
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume32
Issue number2
Publication statusPublished - 1993 Feb
Externally publishedYes

Fingerprint

Chucks
Electrostatic force
Electrostatics
Alumina
aluminum oxides
electrostatics
electrical resistivity
Equivalent circuits
Heat treatment
equivalent circuits
heat treatment

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Relationship between electrical resistivity and electrostatic force of alumina electrostatic chuck. / Watanabe, Toshiya; Kitabayashi, Tetuo; Nakayama, Chiaki.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 32, No. 2, 02.1993, p. 864-871.

Research output: Contribution to journalArticle

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