Relationship between electrical resistivity and electrostatic force of alumina electrostatic chuck

Toshiya Watanabe, Tetuo Kitabayashi, Chiaki Nakayama

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

Alumina electrostatic chucks having various electrical resistivities were fabricated by changing the amount of TiO2and heat treatment conditions. Experimental data on electrostatic force and its response time were obtained for the fabricated electrostatic chucks. The experimental results are compared with the theoretically predicted results utilizing the equivalent circuit model, and the relationship between electrical resistivity and electrostatic force characteristics is discussed.

Original languageEnglish
Pages (from-to)864-871
Number of pages8
JournalJapanese Journal of Applied Physics
Volume32
Issue number8 R
DOIs
Publication statusPublished - 1993 Feb

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Keywords

  • Alumina
  • Electrostatic chuck
  • Electrostatic force
  • Residual electrostatic force
  • Response time
  • Titanium oxide

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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