Reliability of damascene copper interconnects (Invited)

K.Ueno K.Ueno, T.Ishigamil T.Ishigamil, Y.Kakuhara Y.Kakuhara, M.Kawano M.Kawano, Kazuyoshi Ueno

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)408-418
JournalProceedings of ULSI Process Integration IV
Volume2005
Publication statusPublished - 2005 May 1

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