Reliability of damascene copper interconnects (Invited)

K.Ueno K.Ueno, T.Ishigamil T.Ishigamil, Y.Kakuhara Y.Kakuhara, M.Kawano M.Kawano, Kazuyoshi Ueno

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)408-418
JournalProceedings of ULSI Process Integration IV
Volume2005
Publication statusPublished - 2005 May 1

Cite this

K.Ueno, K. U., T.Ishigamil, T. I., Y.Kakuhara, Y. K., M.Kawano, M. K., & Ueno, K. (2005). Reliability of damascene copper interconnects (Invited). Proceedings of ULSI Process Integration IV, 2005, 408-418.

Reliability of damascene copper interconnects (Invited). / K.Ueno, K.Ueno; T.Ishigamil, T.Ishigamil; Y.Kakuhara, Y.Kakuhara; M.Kawano, M.Kawano; Ueno, Kazuyoshi.

In: Proceedings of ULSI Process Integration IV, Vol. 2005, 01.05.2005, p. 408-418.

Research output: Contribution to journalArticle

K.Ueno, KU, T.Ishigamil, TI, Y.Kakuhara, YK, M.Kawano, MK & Ueno, K 2005, 'Reliability of damascene copper interconnects (Invited)', Proceedings of ULSI Process Integration IV, vol. 2005, pp. 408-418.
K.Ueno KU, T.Ishigamil TI, Y.Kakuhara YK, M.Kawano MK, Ueno K. Reliability of damascene copper interconnects (Invited). Proceedings of ULSI Process Integration IV. 2005 May 1;2005:408-418.
K.Ueno, K.Ueno ; T.Ishigamil, T.Ishigamil ; Y.Kakuhara, Y.Kakuhara ; M.Kawano, M.Kawano ; Ueno, Kazuyoshi. / Reliability of damascene copper interconnects (Invited). In: Proceedings of ULSI Process Integration IV. 2005 ; Vol. 2005. pp. 408-418.
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