Reliability of damascene copper interconnects (Invited)

K.Ueno K.Ueno, T.Ishigamil T.Ishigamil, Y.Kakuhara Y.Kakuhara, M.Kawano M.Kawano, Kazuyoshi Ueno

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	408-418
Journal	Proceedings of ULSI Process Integration IV
Volume	2005
Publication status	Published - 2005 May 1

@article{4f49b152492d4279968112c69afac6ae,

title = "Reliability of damascene copper interconnects (Invited)",

author = "K.Ueno K.Ueno and T.Ishigamil T.Ishigamil and Y.Kakuhara Y.Kakuhara and M.Kawano M.Kawano and Kazuyoshi Ueno",

year = "2005",

month = "5",

day = "1",

language = "English",

volume = "2005",

pages = "408--418",

journal = "Proceedings of ULSI Process Integration IV",

}