Original language | English |
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Pages (from-to) | 408-418 |
Journal | Proceedings of ULSI Process Integration IV |
Volume | 2005 |
Publication status | Published - 2005 May 1 |
Reliability of damascene copper interconnects (Invited)
K.Ueno K.Ueno, T.Ishigamil T.Ishigamil, Y.Kakuhara Y.Kakuhara, M.Kawano M.Kawano, Kazuyoshi Ueno
Research output: Contribution to journal › Article › peer-review
1
Citation
(Scopus)