Reliability of damascene copper interconnects

Kazuyoshi Ueno, Takashi Ishigarni, Yumi Kakuhara, Masaya Kawano

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Reliability of damascene copper interconnects'. Together they form a unique fingerprint.

Engineering & Materials Science