Removal processing inside PDMS by short pulse laser

Katsuyuki Hayashi, Shigeki Matsuo

Research output: Contribution to journalArticle

Abstract

In this study, we demonstrated removal processing inside polydimethylsiloxane (PDMS) using a short-pulse laser without a photomask. As a light source, a passive Q-switched Nd:YAG laser was used, with a wavelength of 1064 nm and a pulse width of 500 ps.We fabricated micro cavities with a rectangular shape and complex three-dimensional structure. In addition, the fabricated cavity was cut with a cutter knife and the cross section was observed with scanning electron microscopy in order to investigate the processing characteristics in this experimental system. From the observation of the cavity's cross section, we found that the height was smaller than the design value and the upper wall was bent. We considered that thermal expansion during laser processing was the origin. By simulta-neously slowing down the stage moving speed and repetition rate, the degree of bending was able to be decreased. Although there was bending of the cross section, we fabricated cavities with a rectan-gular shape and a complex three-dimensional structure.

Original languageEnglish
Pages (from-to)141-145
Number of pages5
JournalJournal of Laser Micro Nanoengineering
Volume12
Issue number2
DOIs
Publication statusPublished - 2017 Jan 1

Fingerprint

Polydimethylsiloxane
Laser pulses
cavities
Processing
pulses
lasers
cross sections
Photomasks
Lasers
cutters
Thermal expansion
Light sources
photomasks
Q switched lasers
YAG lasers
thermal expansion
repetition
Wavelength
light sources
Scanning electron microscopy

Keywords

  • 3D processing
  • Internal processing
  • Microchannel
  • PDMS
  • Sub-nanosecond laser

ASJC Scopus subject areas

  • Instrumentation
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

Removal processing inside PDMS by short pulse laser. / Hayashi, Katsuyuki; Matsuo, Shigeki.

In: Journal of Laser Micro Nanoengineering, Vol. 12, No. 2, 01.01.2017, p. 141-145.

Research output: Contribution to journalArticle

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