Research and development of non-contact spin processor for clean process in semiconductor-related-production system by applying HTS magnetic levitation

Satoshi Fukui, Kyosuke Kazama, Syouta Sekiya, Jun Ogawa, Tetsuo Oka, Takao Sato, Satoshi Sorimachi, Kimiyo Saito, Shinsuke Miyazaki

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3 Citations (Scopus)

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