Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere

Toshiya Wantanabe, Tetuo Kitabayashi, Chiaki Nakayama

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In this study, the relationship between electrical resistance and microstructures of TiO2-containing Al2O3 is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.

Original languageEnglish
Pages (from-to)1076-1083
Number of pages8
JournalJournal of the Ceramic Society of Japan. International ed.
Volume101
Issue number10
Publication statusPublished - 1993 Oct
Externally publishedYes

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ASJC Scopus subject areas

  • Engineering(all)

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