Abstract
In this study, the relationship between electrical resistance and microstructures of TiO2-containing Al2O3 is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.
| Original language | English |
|---|---|
| Pages (from-to) | 1076-1083 |
| Number of pages | 8 |
| Journal | Journal of the Ceramic Society of Japan. International ed. |
| Volume | 101 |
| Issue number | 10 |
| Publication status | Published - 1993 Oct |
| Externally published | Yes |
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ASJC Scopus subject areas
- Engineering(all)
Cite this
Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere. / Wantanabe, Toshiya; Kitabayashi, Tetuo; Nakayama, Chiaki.
In: Journal of the Ceramic Society of Japan. International ed., Vol. 101, No. 10, 10.1993, p. 1076-1083.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere
AU - Wantanabe, Toshiya
AU - Kitabayashi, Tetuo
AU - Nakayama, Chiaki
PY - 1993/10
Y1 - 1993/10
N2 - In this study, the relationship between electrical resistance and microstructures of TiO2-containing Al2O3 is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.
AB - In this study, the relationship between electrical resistance and microstructures of TiO2-containing Al2O3 is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.
UR - http://www.scopus.com/inward/record.url?scp=0027682358&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0027682358&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0027682358
VL - 101
SP - 1076
EP - 1083
JO - Journal of the Ceramic Society of Japan. International ed.
JF - Journal of the Ceramic Society of Japan. International ed.
SN - 0912-9200
IS - 10
ER -