Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere

Toshiya Wantanabe, Tetuo Kitabayashi, Chiaki Nakayama

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In this study, the relationship between electrical resistance and microstructures of TiO2-containing Al2O3 is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.

Original languageEnglish
Pages (from-to)1076-1083
Number of pages8
JournalJournal of the Ceramic Society of Japan. International ed.
Volume101
Issue number10
Publication statusPublished - 1993 Oct 1

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'Resistivity and microstructure of alumina ceramics added with TiO<sub>2</sub> fired in reducing atmosphere'. Together they form a unique fingerprint.

  • Cite this