Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere

Toshiya Wantanabe; Tetuo Kitabayashi; Chiaki Nakayama

Resistivity and microstructure of alumina ceramics added with TiO₂ fired in reducing atmosphere

Toshiya Wantanabe, Tetuo Kitabayashi, Chiaki Nakayama

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Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

In this study, the relationship between electrical resistance and microstructures of TiO₂-containing Al₂O₃ is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.

Original language	English
Pages (from-to)	1076-1083
Number of pages	8
Journal	Journal of the Ceramic Society of Japan. International ed.
Volume	101
Issue number	10
Publication status	Published - 1993 Oct 1

ASJC Scopus subject areas

Engineering(all)

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title = "Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere",

abstract = "In this study, the relationship between electrical resistance and microstructures of TiO2-containing Al2O3 is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.",

author = "Toshiya Wantanabe and Tetuo Kitabayashi and Chiaki Nakayama",

year = "1993",

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AU - Wantanabe, Toshiya

AU - Kitabayashi, Tetuo

AU - Nakayama, Chiaki

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N2 - In this study, the relationship between electrical resistance and microstructures of TiO2-containing Al2O3 is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.

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SN - 0912-9200

IS - 10

ER -

Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere

Abstract

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Resistivity and microstructure of alumina ceramics added with TiO₂ fired in reducing atmosphere