Abstract
In this study, the relationship between electrical resistance and microstructures of TiO2-containing Al2O3 is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.
| Original language | English |
|---|---|
| Pages (from-to) | 1076-1083 |
| Number of pages | 8 |
| Journal | Journal of the Ceramic Society of Japan. International ed. |
| Volume | 101 |
| Issue number | 10 |
| Publication status | Published - 1993 Oct 1 |
ASJC Scopus subject areas
- Engineering(all)
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Wantanabe, T., Kitabayashi, T., & Nakayama, C. (1993). Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere. Journal of the Ceramic Society of Japan. International ed., 101(10), 1076-1083.