Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere

Toshiya Wantanabe, Tetuo Kitabayashi, Chiaki Nakayama

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In this study, the relationship between electrical resistance and microstructures of TiO2-containing Al2O3 is studied in order to obtain the information necessary for precisely controlling electrical resistance of alumina ceramics for electrostatic chucks.

Original languageEnglish
Pages (from-to)1076-1083
Number of pages8
JournalJournal of the Ceramic Society of Japan. International ed.
Volume101
Issue number10
Publication statusPublished - 1993 Oct
Externally publishedYes

Fingerprint

Acoustic impedance
Alumina
Chucks
Microstructure
Electrostatics

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere. / Wantanabe, Toshiya; Kitabayashi, Tetuo; Nakayama, Chiaki.

In: Journal of the Ceramic Society of Japan. International ed., Vol. 101, No. 10, 10.1993, p. 1076-1083.

Research output: Contribution to journalArticle

Wantanabe, Toshiya ; Kitabayashi, Tetuo ; Nakayama, Chiaki. / Resistivity and microstructure of alumina ceramics added with TiO2 fired in reducing atmosphere. In: Journal of the Ceramic Society of Japan. International ed. 1993 ; Vol. 101, No. 10. pp. 1076-1083.
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