Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling

K. Mitsuishi, M. Shimojo, M. Tanaka, M. Takeguchi, K. Furuya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
PublisherThe Japan Society of Applied Physics
Pages118-119
Number of pages2
ISBN (Print)4990247205, 9784990247201
DOIs
Publication statusPublished - 2004
Externally publishedYes
Event2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan
Duration: 2004 Oct 262004 Oct 29

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2004

Conference

Conference2004 International Microprocesses and Nanotechnology Conference
CountryJapan
CityOsaka
Period04/10/2604/10/29

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Mitsuishi, K., Shimojo, M., Tanaka, M., Takeguchi, M., & Furuya, K. (2004). Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling. In Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 118-119). [28P-6-17] (Digest of Papers - Microprocesses and Nanotechnology 2004). The Japan Society of Applied Physics. https://doi.org/10.1109/imnc.2004.245752