Resonator using polarization beam splitter prism for microlithography KrF excimer laser

Keiichiro Yamanaka, Yuji Hashidate, Hidemi Takahashi, Nobuaki Furuya

Research output: Contribution to journalConference articlepeer-review

Abstract

We discuss a new resonator design for sub-pm bandwidth (FWHM) KrF excimer laser using an etalon, a grating and prisms. This resonator uses a polarization beam splitter prism (PBSP) which has both functions of splitting polarized beam and beam expansion to reduce the resonator length. In our experiments, the output power is improved 29.4% by using PBSP in comparison with the conventional method, while the bandwidth (FWHM) is reduced from less than 0.9pm to less than 0.6pm at the same time. A calculation has been done to confirm the output power dependence on the resonator length and the loss of optics. Its result explains our experimental results approximately. We demonstrated that PBSP has a significant effect to improve the output power of the narrow bandwidth KrF excimer laser that would result in the extension of chamber lifetime. Furthermore, this technique will help the development of the band narrowing excimer laser for microlithography.

Original languageEnglish
Pages (from-to)296-303
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3267
DOIs
Publication statusPublished - 1998
Externally publishedYes
EventLaser Resonators - San Jose, CA, United States
Duration: 1998 Jan 261998 Jan 27

Keywords

  • Excimer Laser
  • Microlithography
  • Sub-pm Bandwidth Narrowing Resonator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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