Retarded Growth of Sputtered HfO2 Films on Germanium

K. Kita, M. Sasagawa, M. Toyama, K. Kyuno, A. Toriumi

Research output: Contribution to journalArticle

Original languageEnglish
Journal2004 MRS Spring Meeting
Publication statusPublished - 2004 Apr 1

Cite this

Kita, K., Sasagawa, M., Toyama, M., Kyuno, K., & Toriumi, A. (2004). Retarded Growth of Sputtered HfO2 Films on Germanium. 2004 MRS Spring Meeting.

Retarded Growth of Sputtered HfO2 Films on Germanium. / Kita, K.; Sasagawa, M.; Toyama, M.; Kyuno, K.; Toriumi, A.

In: 2004 MRS Spring Meeting, 01.04.2004.

Research output: Contribution to journalArticle

Kita K, Sasagawa M, Toyama M, Kyuno K, Toriumi A. Retarded Growth of Sputtered HfO2 Films on Germanium. 2004 MRS Spring Meeting. 2004 Apr 1.
Kita, K. ; Sasagawa, M. ; Toyama, M. ; Kyuno, K. ; Toriumi, A. / Retarded Growth of Sputtered HfO2 Films on Germanium. In: 2004 MRS Spring Meeting. 2004.
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