Retarded Growth of Sputtered HfO2 Films on Germanium

K. Kita, M. Sasagawa, M. Toyama, K. Kyuno, A. Toriumi

Research output: Contribution to journalArticle

Original languageEnglish
Journal2004 MRS Spring Meeting
Publication statusPublished - 2004 Apr 1

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Kita, K., Sasagawa, M., Toyama, M., Kyuno, K., & Toriumi, A. (2004). Retarded Growth of Sputtered HfO2 Films on Germanium. 2004 MRS Spring Meeting.