Original language | English |
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Journal | Applied Physics Letters 89 |
Publication status | Published - 2006 Nov 1 |
Reversible creation and annihilation of a local leakage path in HfO2/GeOx stacked gate dielectrics: A direct observation by ultrahigh vacuum conducting atomic force microscopy
K.Yamamura K.Yamamura, K.Kita K.Kita, A.Toriumi A.Toriumi, K.Kyuno K.Kyuno, Kentaro Kyuno
Research output: Contribution to journal › Article › peer-review