RHEED investigation of metal epitaxies and multilayers

K. Mae, K. Kyuno, T. Kaneko, R. Yamamoto

Research output: Contribution to journalArticlepeer-review

Abstract

Homoepitaxies and heteroepitaxies of Au and Ag were examined by means of RHEED intensity oscillation. The surface reconstruction of Au was found to influence the damping of the RHEED oscillations. We have also performed the RHEED observations during the growth of Au/Co multilayers at some temperatures. Samples grown at lower temperatures have smoother interface and show greater perpendicular magnetic anisotropy.

Original languageEnglish
Pages (from-to)235-239
Number of pages5
JournalMicroelectronic Engineering
Volume25
Issue number2-4
DOIs
Publication statusPublished - 1994 Aug

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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