| Original language | English |
|---|---|
| Journal | Abstract of Advanced Metallization Conference in 1998 |
| Publication status | Published - 1998 Oct 6 |
Seed effect on self-annealing of electroplated copper films
K.Ueno K.Ueno, T.Ritzdorf T.Ritzdorf, S.Grace S.Grace, Kazuyoshi Ueno
Research output: Contribution to journal › Article › peer-review