Seed effect on self-annealing of electroplated copper films

K.Ueno K.Ueno, T.Ritzdorf T.Ritzdorf, S.Grace S.Grace, Kazuyoshi Ueno

Research output: Contribution to journalArticle

Original languageEnglish
JournalAbstract of Advanced Metallization Conference in 1998
Publication statusPublished - 1998 Oct 6

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