Seed layer dependence of room-temperature recrystallization elecroplated copper films

K.Ueno K.Ueno, T.Ritzdorf T.Ritzdorf, S.Grace S.Grace, Kazuyoshi Ueno

Research output: Contribution to journalArticle

63 Citations (Scopus)
Original languageEnglish
Pages (from-to)4930-4935
JournalJournal of Applied Physics
Volume86
Publication statusPublished - 1999 Nov 1

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