Seed layer dependence of room-temperature recrystallization elecroplated copper films

K.Ueno K.Ueno, T.Ritzdorf T.Ritzdorf, S.Grace S.Grace, Kazuyoshi Ueno

Research output: Contribution to journalArticle

63 Citations (Scopus)
Original languageEnglish
Pages (from-to)4930-4935
JournalJournal of Applied Physics
Volume86
Publication statusPublished - 1999 Nov 1

Cite this

Seed layer dependence of room-temperature recrystallization elecroplated copper films. / K.Ueno, K.Ueno; T.Ritzdorf, T.Ritzdorf; S.Grace, S.Grace; Ueno, Kazuyoshi.

In: Journal of Applied Physics, Vol. 86, 01.11.1999, p. 4930-4935.

Research output: Contribution to journalArticle

K.Ueno, K.Ueno ; T.Ritzdorf, T.Ritzdorf ; S.Grace, S.Grace ; Ueno, Kazuyoshi. / Seed layer dependence of room-temperature recrystallization elecroplated copper films. In: Journal of Applied Physics. 1999 ; Vol. 86. pp. 4930-4935.
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